FFKM ESD
FFKM ESD elastomers feature a fully fluorinated polymer backbone that provides controlled electrostatic dissipation together with exceptional chemical and plasma resistance. They withstand aggressive process and cleaning gases, oxygen, ozone, and UV exposure, and operate continuously at temperatures up to 300 °C, making them ideal for high-temperature semiconductor applications such as CVD and Etch where cleanliness and ESD control are critical.
Middle-conductive performance FFKM with excellent mechanical property focusing on harsh semiconductor applications such as CVD, Etch and offers electric resistivity (target 10E7 ohm) and plasma resistance with process gases and cleaning gases like O2, NF3 etc. The maximum service temperature recommend 300 ℃
Low sticky middle-conductive performance FFKM with excellent mechanical property focusing on harsh semiconductor applications such as CVD, Etch and offers electric resistivity (target 10E7 ohm) and plasma resistance with process gases and cleaning gases like O2, NF3 etc.The maximum service temperature recommend 300 ℃