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Elastomers
(Sealing Products)
O-rings - FFKM, FKM, Silicone, NBR etc
Pads - FFKM, FKM, Silicone, EPDM etc
Gaskets - FKM, Silicone, NBR
Special Seals - PFA, PTFA, Engineering Plastic
Hybrid material Sealing - Metallic + Elastomers
Purpose
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Lower contamination & longer life time seals for vacuum chamber
Applications
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Fab (Semiconductor, LCD, LED, OLED, etc…)
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Semiconductor Equipment, LCD, OLED Equipment
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Chamber Lid O-ring, Gas Inlet, Shower Head, Gate Valve
Quality
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High purity FFKM (Perfluoroelastomer)
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No Metallic contents
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Longer life span - > Save cost & Safe
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Nano-sized fillers
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