FFKM elastomers have a fluorinated backbone and higher fluorine content than the FKM compound, allowing for greater elasticity. This material also offers the possibility of temperature ratings up to 325°C and nearly universal chemical compatibility, making it an ideal choice for challenging applications.
FFKM
Perfluoroelastomer
Targeted specially for harsh plasma environment with cleaning gases and high temperature process also wet chemical process with reactive or corrosive chemicals
For high-purity and excellent performance perfluoroelastomer (FFKM) focusing on harsh semiconductor applications such as CVD & Etch
Special white perfluoroelastomer (FFKM) that developed for all thermal processes with etching gases
Black perfluoroelastomer (FFKM) for high temperature plasma with excellent chemical resistance and gas deposition application
Pure material of perfluoroelastomer (FFKM) and targeted specially for low particle generation. Exhibits outstanding thermal stability, excellent performance in HDPCVD, PECVD, SACVD, etc
Upgraded version of perfluoroelastomer targeted specially for lower particle generation. It exhibits outstanding thermal stability, excellent performance in Dry Etch, HDPCVD, SACVD, Wet- Etching, Ashing, etc